JPH0734234Y2 - 複合形真空ポンプ - Google Patents

複合形真空ポンプ

Info

Publication number
JPH0734234Y2
JPH0734234Y2 JP1989079733U JP7973389U JPH0734234Y2 JP H0734234 Y2 JPH0734234 Y2 JP H0734234Y2 JP 1989079733 U JP1989079733 U JP 1989079733U JP 7973389 U JP7973389 U JP 7973389U JP H0734234 Y2 JPH0734234 Y2 JP H0734234Y2
Authority
JP
Japan
Prior art keywords
pump element
type pump
pump
exhaust
thread groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989079733U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319491U (en]
Inventor
隆司 山本
文一 谷口
隆夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP1989079733U priority Critical patent/JPH0734234Y2/ja
Publication of JPH0319491U publication Critical patent/JPH0319491U/ja
Application granted granted Critical
Publication of JPH0734234Y2 publication Critical patent/JPH0734234Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1989079733U 1989-07-06 1989-07-06 複合形真空ポンプ Expired - Lifetime JPH0734234Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989079733U JPH0734234Y2 (ja) 1989-07-06 1989-07-06 複合形真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989079733U JPH0734234Y2 (ja) 1989-07-06 1989-07-06 複合形真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0319491U JPH0319491U (en]) 1991-02-26
JPH0734234Y2 true JPH0734234Y2 (ja) 1995-08-02

Family

ID=31624159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989079733U Expired - Lifetime JPH0734234Y2 (ja) 1989-07-06 1989-07-06 複合形真空ポンプ

Country Status (1)

Country Link
JP (1) JPH0734234Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS6385288A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPS63147989A (ja) * 1986-12-09 1988-06-20 Daikin Ind Ltd 複合真空ポンプ
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械

Also Published As

Publication number Publication date
JPH0319491U (en]) 1991-02-26

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